http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013137461-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4283a2f8ade5dc582d75300427a38e50
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 2011-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9cef5366dc07f6b533d2caa714f4712
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0bd0e479c3f0617ac232c90b553d59f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830ed41f6da69d5808790021b146b44a
publicationDate 2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013137461-A
titleOfInvention Positive resist composition and method for manufacturing electronic device
abstract PROBLEM TO BE SOLVED: To provide a positive resist composition which can form a resist pattern which has high resolution, is not easily deformed by heat and has excellent heat resistance, and is excellent in releasability from a substrate. The positive resist composition of the present invention comprises an alkali-soluble resin, a photosensitizer, a solvent, and silicone oil. [Selection figure] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160032911-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101710171-B1
priorityDate 2011-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422941605
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19739486
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9007
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419532263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7771
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411224273
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160907703
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18916270
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21896293
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7707
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424468465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21225906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558948
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6706
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410488260
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7948
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83648
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12184
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452755407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544706
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17016
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416046182
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425044841
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574247
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14876011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574217
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419585522
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7564
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452228638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490744
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419564793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411300290
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79130
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17845026
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14009024
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID335
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414779695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744642
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11450
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484742
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410667519
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422151984
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420464386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419968521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21960797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414206502
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7249
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420208404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6996
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69047
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75024
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7726
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69955
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410481566
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422209161
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452209933
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422973363
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410481094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406907632
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407514449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421993795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422482729
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419476272
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419586677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545706
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415823500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20861
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415792570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420257518
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12580
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10436
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID634278
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID177
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6937
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412740202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419541999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421453152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411292437
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57204623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422035561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6943
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15375533
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67882499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872666
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID126
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160541259
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421458550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419551524
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421108790
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21459721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415747868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484874
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67741165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID460
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514890
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12173
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411653627
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421208031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410904264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7381
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427889120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452133999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414009332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21954613
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412798128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558927

Total number of triples: 181.