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publicationDate 2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013134249-A
titleOfInvention Probe card and manufacturing method thereof
abstract The present invention relates to a probe card and a manufacturing method thereof. A probe card according to an embodiment of the present invention includes a substrate, a groove portion, at least one metal layer formed on one surface of the substrate, and inserted into the groove portion of each of the metal layers. And at least one probe pin formed on one surface of the metal layer and the groove portion, and a solder portion that joins the probe pin to the groove portion. [Selection] Figure 5
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016195235-A
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priorityDate 2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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