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publicationDate 2013-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013129593-A
titleOfInvention Polycrystalline silicon member and method for destroying silicon body
abstract Disclosed is a polycrystalline silicon member having at least one fracture surface or a cutting surface and having a metal contamination of 0.07 ng / cm 3 to 1 ng / cm 3 . A method of destroying a silicon body, preferably a rod of polycrystalline silicon, comprising the following steps: a) a step of measuring the lowest natural bending frequency of the silicon body, and b) a silicon body by means of a vibration generator. Is excited at its lowest natural bending frequency, the excitation is performed at the excitation point of the silicon body, and the silicon body is destroyed at the excitation point, and the metal contamination is 0.07 ng / cm 2 to 1 ng / cm 2 . A silicon member having a fracture surface comprising is obtained. [Selection] Figure 1
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