| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a18f4049bce3793718cf7b9e92bf268c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ce301740d8084c04f25675bef76a390
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b65507f98dbf151958a02e915b9bb1fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9847eaba92b12fa1a73a4d3deeee2927
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_635d2651eba3c9407b6f522a1ea94113 |
| publicationDate |
2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013123062-A |
| titleOfInvention |
Wafer carrier with hub |
| abstract |
A wafer carrier formed of a material that has strength and rigidity at high temperatures and does not react with a gas used in a process. A wafer carrier for a rotating disk CVD reactor is a single plate of ceramic, such as silicon carbide, and also includes a hub that is removably attached to the plate in the central region of the plate. ing. The hub 40 is adapted to provide a secure connection to the reactor spindle 16 without applying concentrated stress to the ceramic plate 32. During the cleaning of the plate 32, the hub 40 can be removed. [Selection] Figure 4 |
| priorityDate |
2007-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |