http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013116853-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 |
| filingDate | 2013-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4e0623a11f80c164bb8f879d0840692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8547b5de250b0505a4158fc1b9523776 |
| publicationDate | 2013-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013116853-A |
| titleOfInvention | Group III nitride crystal substrate, group III nitride crystal substrate with epitaxial layer, and semiconductor device |
| abstract | The present invention relates to a group III nitride crystal substrate whose surface is polished under a predetermined condition so that a semiconductor device having high characteristics can be manufactured, a group III nitride crystal substrate with an epitaxial layer including the same, and a semiconductor Provide a device. In the group III nitride crystal substrate 410, the thickness of the work-affected layer of the group III nitride crystal substrate 410 is 50 nm or less, and the amount of impurities on the surface of the group III nitride crystal substrate 410 is atomic. The number of atoms of an element having an element number of 19 or more is 1 × 10 12 atoms / cm 2 or less, the number of atoms of the elements having an atomic number of 1 to 18 excluding O and C is 1 × 10 14 atoms / cm 2 or less, and an O atom And C atoms are 40 atom% or less with respect to the atoms of all elements existing on the surface, respectively, and the group III element atoms and N atoms on the surface are based on the sum of group III element atoms and N atoms existing on the surface , 40 atomic% to 60 atomic%, respectively. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017210396-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102230096-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210000328-A |
| priorityDate | 2013-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.