http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013115153-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2011-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_930b51b37360bee3adef2aa255995c68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_504141c248f62d92ab25a0465303e736 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bca3043c1cbf1b79fa7eac8031c8c95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3015cb70d3bdde18cb2482a7688ea5d2 |
| publicationDate | 2013-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013115153-A |
| titleOfInvention | Polishing composition |
| abstract | An object of the present invention is to improve the storage stability of a polishing composition used for polishing a polishing object containing a III-V group compound material. The polishing composition of the present invention comprises an oxidizing agent such as hydrogen peroxide, ammonium persulfate, and sodium dichloroisocyanurate, and non-oxidizing agents such as acetonitrile, acetone, tetrahydrofuran, N, N-dimethylformamide, and dimethyl sulfoxide. And a protic polar solvent. [Selection figure] None |
| priorityDate | 2011-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.