http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013115152-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2011-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bca3043c1cbf1b79fa7eac8031c8c95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_504141c248f62d92ab25a0465303e736 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_930b51b37360bee3adef2aa255995c68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3015cb70d3bdde18cb2482a7688ea5d2 |
| publicationDate | 2013-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013115152-A |
| titleOfInvention | Polishing composition |
| abstract | High polishing selectivity for a part containing a III-V compound material when used in an application for polishing a polishing object having a part containing a III-V compound material and a part containing a silicon material The polishing composition which can exhibit is provided. The polishing composition of the present invention contains abrasive grains having an average primary particle size of 40 nm or less and an oxidizing agent, and preferably a surface OH group of a portion containing a silicon material of an object to be polished. It further contains a suppressor compound that functions to bind and suppress hydrolysis of the portion containing the silicon material. Alternatively, the polishing composition of the present invention contains abrasive grains, an oxidizing agent, and a suppressor compound. It is preferable that pH of polishing composition is neutral. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016084682-A1 |
| priorityDate | 2011-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 176.