http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013108923-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49982 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-093 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-098 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-02 |
filingDate | 2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ef826ec6e5771265ce0b6d75f7601dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b546b48dc2a9f44a0ac3951efffc3df |
publicationDate | 2013-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2013108923-A |
titleOfInvention | Three-dimensional magnetic field sensor and manufacturing method thereof |
abstract | A three-dimensional magnetic field sensor having a simple configuration and capable of reducing manufacturing costs is realized. A three-dimensional magnetic field sensor (1) includes a substrate (40) having a flat element arrangement surface (40a) and MR elements (10, 20, 30) arranged on the element arrangement surface (40a) side of the substrate (40) and integrated with the substrate (40). It has. The MR element 10 has a fixed magnetization layer 11, a nonmagnetic layer 12, and a free layer 13. The MR element 20 has a fixed magnetization layer 21, a nonmagnetic layer 22, and a free layer 23, and the MR element 30 has a magnetization. It has a fixed layer 31, a nonmagnetic layer 32, and a free layer 33. The magnetization directions of the free layers 13, 23, and 33 change according to the direction of the external magnetic field H. The magnetization direction of the magnetization fixed layer 11 is fixed in the X direction parallel to the element arrangement surface 40a. The magnetization direction of the magnetization fixed layer 21 is fixed in the Y direction that is parallel to the element arrangement surface 40a and orthogonal to the X direction. The magnetization direction of the magnetization fixed layer 31 is fixed in the Z direction perpendicular to the element arrangement surface 40a. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019216179-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10890630-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10698043-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017204151-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017204151-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7014159-B2 |
priorityDate | 2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.