http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013105755-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_efbfdc7316d3b1b7ceaee5366a61b6e0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate | 2011-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1978bb4044d4e1ee6fb2e420a02bf97c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24fc3523f344d506f0d29c34f97f3717 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39f95b03d1485c182df23e25536bd0fb |
| publicationDate | 2013-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013105755-A |
| titleOfInvention | Alignment method and uneven pattern forming method |
| abstract | The present invention provides an alignment method capable of accurately aligning a resin stamper and a substrate even when the resin stamper is deformed. When transferring a fine concavo-convex pattern of a resin stamper 16 having a fine concavo-convex pattern on one surface to a photocurable resin layer 20 formed on a substrate 18, the resin stamper 16 and An alignment method for aligning the substrate 18 with the following steps: The stage 12 disposed so as to face the substrate 18 is in contact with the surface opposite to the concavo-convex pattern forming surface 16a. Based on the fixing step of mounting the resin stamper 16 and fixing the resin stamper 16 from the opposite surface side; the detecting step of detecting the deformation site of the resin stamper 16; and the detection result of the deformation site, An alignment method comprising: an expansion and contraction step of expanding and contracting the resin stamper 16 in a planar direction in a fixed state. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7286391-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016009750-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020177978-A |
| priorityDate | 2011-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 98.