http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013104954-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
filingDate | 2011-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aed3da245984185c752ee62935ace589 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c2bdd6dc202dc9e38663ed7bae4c128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6990198dd6b31314b784d3cde874cbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ff651eff6fc8ba8d837a5260f894108 |
publicationDate | 2013-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2013104954-A |
titleOfInvention | Wafer surface treatment method and surface treatment liquid |
abstract | A surface treatment liquid and a surface treatment method capable of improving the adhesion between a wafer containing silicon element and a resist. A surface treatment step of bringing a surface treatment solution for a silicon element-containing wafer into contact with a wafer surface to make the wafer surface hydrophobic, a treatment solution removal step of removing the treatment solution from the wafer surface, the wafer A silicon element-containing surface treatment solution for a silicon element containing a silicon compound represented by the following general formula [1] in the surface treatment step, an acid, and a diluting solvent is included. Use. R 1 a SiX 4-a [1] [In the formula [1], R 1 s are each independently a hydrogen group or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrogen atom of the hydrocarbon group may be substituted with a halogen atom. Good. X is each independently a monovalent functional group in which the element bonded to the silicon element is nitrogen, and a is an integer of 1 to 3. ] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I723995-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016181753-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016181753-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200108887-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017011208-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111512418-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102465276-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111512418-B |
priorityDate | 2011-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 245.