http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013102177-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B13-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a94d16632c574f57ae5758cd1371b64f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4e2d50068a4295e851a53f6af1ebc9f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74b45422ded5b145d479d83341e452e5 |
| publicationDate | 2013-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013102177-A |
| titleOfInvention | Projection optical system |
| abstract | A projection optical system capable of suppressing the occurrence of aberration is provided. A projection optical system supplies irradiation light from a first surface to a second surface, and projects an image of the first surface onto the second surface. The projection optical system can be arranged in the optical path of the irradiation light, and the phase difference compensation member E1 that reduces the phase difference generated between the light of the first polarization component and the light of the second polarization component in the irradiation light; And a holding mechanism 10 that holds the phase difference compensation member E1 in a releasable manner so that the phase difference compensation member E1 is disposed in the optical path. [Selection] Figure 2 |
| priorityDate | 2012-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.