http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013100220-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B9-12 |
| filingDate | 2012-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60c8b54b97792a689b05ec084dd9ca4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2801d13eab5a1d04cf6b1f9ecd11cad5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b376b41e4b155827acfbc8e772092d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca1e72a78ac32721d8316cdb9aa9a0a2 |
| publicationDate | 2013-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013100220-A |
| titleOfInvention | Periodic table group 13 metal nitride semiconductor crystal manufacturing method and periodic table group 13 metal nitride semiconductor crystal manufactured by the manufacturing method |
| abstract | In a periodic table group 13 metal nitride semiconductor crystal obtained by epitaxial growth on a base substrate having a nonpolar plane and / or a semipolar plane as a main surface, the extinction coefficient is small, and it is suitable for use in a device. It is another object of the present invention to provide a high-quality semiconductor crystal in which the dopant concentration in the crystal can be controlled, and a manufacturing method capable of manufacturing such a semiconductor crystal. [Solution] High-quality Group 13 metal of periodic table suitable for devices with precise control of dopant concentration by suppressing oxygen doping due to impurities and increasing Si concentration over O concentration, and with a smaller extinction coefficient. A nitride semiconductor crystal can be provided. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018024578-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018058742-A |
| priorityDate | 2011-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.