http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013096997-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7aada2bb11143072d2540936223acad |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H9-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02028 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J9-02 |
| filingDate | 2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dd91b4b072ee6b1bd40225032e9e6f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_183cdd51bfe15bbc2648bac0e65c7390 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fa403bfe86b8ad55386baa9c77c506c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc2922b635c0c6be6ed6fb8910fb933a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0899c201e5342842ae13d0a923e6c24 |
| publicationDate | 2013-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013096997-A |
| titleOfInvention | Optical interference measurement apparatus and optical interference measurement method for an object |
| abstract | An optical interference measurement technique capable of acquiring additional information and having a robust apparatus structure and high measurement accuracy is provided. An optical interference measuring apparatus includes a beam splitter that splits a starting beam from a light source into a measurement beam and a first reference beam, a light superimposing unit, and a first detector. With. The superimposing means and the first detector 8a cooperate with each other. The measurement beam reflected by the object 7 and the first reference beam are superimposed on the detection surface of the first detector. The beam splitter 5a splits the starting beam 2 into a measuring beam 3, a first reference beam 4a, and at least a second reference beam 4b. A second detector 8b associated with the superimposing means is provided, and the measurement beam as the first received beam 4b ′ scattered by the object 7 and the second reference beam 4b are the second detector 8b. Are overlapped on the detection surface. [Selection] Figure 2 |
| priorityDate | 2011-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.