| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3da3be7881f435c622d17a34adc162a1 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00 |
| filingDate |
2011-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b7fe5cdcce66fd17f7b536a2a230253 |
| publicationDate |
2013-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013086501-A |
| titleOfInvention |
Barrier film, barrier film manufacturing method and electronic device |
| abstract |
A barrier film having high water vapor barrier performance, a manufacturing method thereof, and an electronic apparatus using the barrier film are realized. When manufacturing a barrier film 10 having a gas barrier layer 2 on a substrate 1, vacuum ultraviolet light is applied to the coating film formed by coating a coating liquid containing polysilazane on the substrate 1. After the irradiation treatment, the gas barrier layer 2 having a reduced water permeability was formed by performing a heat treatment at 100 ° C. or higher and 250 ° C. or lower. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019049735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015522454-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019049735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016010901-A |
| priorityDate |
2011-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |