| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-36 |
| filingDate |
2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_235d7dc275edb3098378f8b52829616b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fb013422cf2dbefd1a54d70e3700802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc70d74554002911328d862253886ee3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5884954c2f1e9b0f2a90b966d91f1912 |
| publicationDate |
2013-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013073894-A |
| titleOfInvention |
Membrane processing method |
| abstract |
The present invention provides a film processing method which is performed with lower energy and which is superior in processing accuracy and processing quality. A portion to be removed of a film formed on the first main surface of a glass substrate having a first main surface and a second main surface opposite to the first main surface is irradiated with laser light for removal. A film processing method for forming a portion, wherein a side portion of the portion to be removed is removed by irradiation with a picosecond laser beam or a femtosecond laser beam, and the side portion is removed by the first step. A film processing method comprising: a second step of removing the portion to be removed by irradiation with nanosecond laser light to form the removal portion. [Selection] Figure 6B |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015125628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109079314-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020526423-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113681163-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113681163-A |
| priorityDate |
2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |