http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013064986-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 |
| filingDate | 2012-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0578340d8eda8655050b54e7ae628333 |
| publicationDate | 2013-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013064986-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | A resist composition capable of obtaining a resist pattern having excellent line edge roughness (LER) is provided. A resist composition comprising a resin that is insoluble or hardly soluble in an alkaline aqueous solution and that can be dissolved in an alkaline aqueous solution by the action of an acid, an acid generator, and a compound represented by formula (I). [In the formula (I), R 1a and R 1b are the same or different and represent a hydrocarbon group having 1 to 18 carbon atoms, and the methylene group contained in the hydrocarbon group is replaced by an oxygen atom or a carbonyl group. Alternatively, R 1a and R 1b may be combined to form a ring. R 2 represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10095111-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016035497-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016035497-A1 |
| priorityDate | 2011-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 251.