| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2012-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0578340d8eda8655050b54e7ae628333 |
| publicationDate |
2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013061642-A |
| titleOfInvention |
Resist composition and method for producing resist pattern |
| abstract |
A resist composition capable of producing a resist pattern with excellent pattern collapse resistance (PCM) is provided. A resist composition comprising a resin that is insoluble or hardly soluble in an alkaline aqueous solution and that can be dissolved in an alkaline aqueous solution by the action of an acid, an acid generator, and a compound represented by formula (I). [In the formula (I), R 1a and R 1b are the same or different and represent a hydrocarbon group having 1 to 18 carbon atoms, and the methylene group contained in the hydrocarbon may be replaced by an oxygen atom or a carbonyl group, and R 1a and R 1b are You may form the ring which may have a substituent together. R 2 and R 3 are the same or different and represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R 2 and R 3 may have a substituent together. A ring may be formed. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10131646-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014170205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018109765-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015168617-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3272744-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018062503-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7009980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7295691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7009978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018109764-A |
| priorityDate |
2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |