| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00 |
| filingDate |
2011-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46a535d627c8dd7502f9aa1c2b2a5f9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23472662a9e98090c8a7c5c6a24c0f29 |
| publicationDate |
2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013049001-A |
| titleOfInvention |
Liquid application device and liquid application method |
| abstract |
An object of the present invention is to provide a liquid agent coating apparatus and a liquid agent coating method capable of reducing the size and improving the area productivity. A substrate supply magazine R5 in which a substrate 4 containing a substrate 4 before the liquid Q is applied is installed, and the substrate supply magazine R5 is removed from the substrate supply magazine 5 installed in the substrate supply unit R1. An application head 14 for applying the solution Q to the substrate 4 transferred to the work position, and a substrate recovery unit R2 in which a substrate recovery magazine 5 for storing the substrate 4 applied with the solution Q by the application head 14 are installed. In the liquid application device 1, the substrate supply unit R1 and the substrate recovery unit R2 are positioned side by side in the vertical direction. [Selection] Figure 1 |
| priorityDate |
2011-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |