| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2011-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_562271e1e5d4e10b68b2668bd4e1768a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39484a3a19f976aec5b46fadbba446af |
| publicationDate |
2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013047361-A |
| titleOfInvention |
Sputtering target, manufacturing method thereof, thin film using the target, thin film sheet including the thin film, and laminated sheet |
| abstract |
A sputtering target suitable for forming a thin film having excellent transparency and gas barrier properties, a method for producing the sputtering target, a thin film using the target, a thin film sheet including the thin film, and a laminated sheet are provided. The sputtering target of the present invention is composed of a sintered body mainly composed of zinc oxide (ZnO) and tin oxide (SnO 2 ), and the sintered body has a relative density of 95% or more. The molar ratio of (ZnO) to tin oxide (SnO 2 ) is 15:85 to 90:10. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018086860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015040717-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020129424-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015189011-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019183244-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019202819-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020129558-A1 |
| priorityDate |
2011-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |