http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013047210-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0106502b1821cd02a499d92f680621ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04d3730b6ad527289e0c18d5b14850d2 |
| publicationDate | 2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013047210-A |
| titleOfInvention | Salt and resist composition |
| abstract | Provided are a salt useful as an acid generator for a resist composition, a resist composition containing the salt and capable of producing a resist pattern having excellent CD uniformity (CDU). A salt represented by formula (I). [In Formula (I), R 1 represents an aromatic hydrocarbon group which may have a substituent. R 2 represents a base dissociable group. R 3 represents a hydrogen atom or a hydroxy group. X 1 and X 2 each independently represent the formula (a-g1) (In the formula (a-g1), s represents an integer of 0 to 2. A 10 and A 11 each independently represents an aliphatic hydrocarbon group. X 10 represents an oxygen atom, a carbonyl group, or a carbonyloxy group. Or an oxycarbonyl group, m1 represents 1 or 2, and m2 represents 0 or 1, provided that m1 + m2 = 2, and A − represents a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion, and Represents an organic anion selected from carboxylate anions.] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015157802-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013166748-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018048117-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6991786-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013047211-A |
| priorityDate | 2011-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 244.