http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013045783-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-165 |
| filingDate | 2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f8c1586185836ee961c706b82229f29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_113b74e094d96abaa12f22a5a47dcd68 |
| publicationDate | 2013-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013045783-A |
| titleOfInvention | Thin film manufacturing apparatus and thin film manufacturing method |
| abstract | An apparatus for producing a thin film by an ink jet method having functional ink ejection stability is provided. A stage 203 that holds a substrate 202, and an IJ head 208 that is disposed opposite to the stage 203 and ejects functional ink from a nozzle by an inkjet method and applies the functional ink onto the substrate 202 are provided. And / or the IJ head 208 is moved relatively to discharge the functional ink onto the substrate 202 and apply the liquid ink in an arbitrary pattern, and the functional ink on the substrate 202 is heated and crystallized. A wiping blade 212 that slides on the scanning path when the functional ink of the IJ head 208 is applied. Have [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014177042-A |
| priorityDate | 2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.