http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013042124-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate | 2012-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08b0a33953f17c869afe3e2cc2263bda http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b3d977aefb507dae169e215236c06c4 |
| publicationDate | 2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013042124-A |
| titleOfInvention | Pattern production method using photocurable nanoimprinting composition |
| abstract | PROBLEM TO BE SOLVED: To provide a pattern manufacturing method for forming a pattern finer than a mold pattern on a substrate using a photocurable nanoimprint composition. A photocurable nanoimprinting composition containing a hydrolyzate of alkoxysilanes is applied onto a substrate to form a coating film, the mold is brought into contact with the coating film, and the pattern of the mold is transferred. And after light-irradiating and hardening a coating film, a pattern finer than the pattern of a metal mold | die is formed on a board | substrate by heat-processing at 120 to 250 degreeC. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015076512-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019153625-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015056487-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10189203-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015131481-A |
| priorityDate | 2011-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 498.