http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013034026-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2012-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c07cd9c26d2f25f853b8e6045af989b |
| publicationDate | 2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013034026-A |
| titleOfInvention | Polishing composition and method for producing semiconductor wafer using the same |
| abstract | A polishing composition capable of reducing the number of LPDs resulting from polishing on the surface of an object to be polished after polishing with the polishing composition and a method for producing a semiconductor wafer using the same are provided. To do. The polishing composition of the present invention is a polishing composition used for silicon preliminary polishing, and when a specific silicon wafer is subjected to the following polishing operation, polishing processing per wafer surface is performed. The number of LPDs resulting from is less than 30. (1) Pre-polishing step using polishing composition, (2) Final polishing using final polishing composition, and further measuring the first LPD after SC-1 cleaning and isopropyl alcohol vapor drying. Step (3) After the wafer is further SC-1 cleaned and isopropyl alcohol vapor dried, the second LPD is measured, and then the number of LPDs whose measurement positions do not change between the first and second LPD measurements is defined as the number of LPDs. The process of measuring. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016035250-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016053114-A |
| priorityDate | 2012-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.