| abstract |
Acrylic copolymer having a specific structure and the use of this copolymer have high transparency to radiation, and have basic physical properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape. A resin composition is provided. An acrylic copolymer containing a repeating unit represented by the following formula and a radiation-sensitive resin composition using the copolymer. [Selection figure] None |