http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013030567-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c38f2b4cb52c3aa453e6b6784f5f9e0 |
| publicationDate | 2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013030567-A |
| titleOfInvention | Charged particle beam lens array |
| abstract | A charged particle beam lens array capable of correcting aberration of a charged particle beam caused by charging of an insulator surface constituting the charged particle beam lens array is provided. A charged particle beam lens array for controlling the optical characteristics of a plurality of charged particle beams emitted from a charged particle source is supported by being spaced apart from each other in the direction of an optical axis 3 via insulators 2A and 2B. It has a plurality of electrodes 1A, 1B, 1C. The electrode has a plurality of through holes 4 through which the charged particle beam 5 passes. The arrangement of the plurality of through holes is shifted from the respective reference positions 8 defined by the two translation vectors in a direction for correcting the aberration of the charged particle beam generated in the charged particle beam lens array. The shift amount of each through hole from the reference position is larger as the reference position is closer to the insulator surfaces 6A and 6B, and is smaller as the distance from the insulator surface is increased. [Selection] Figure 1 |
| priorityDate | 2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.