| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-44 |
| filingDate |
2012-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bd5be9be9815b72cbd96780937bd39d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6232da990bc321e29241be3c18a5581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1afb47bb72c3480aad54aad5d7b8163 |
| publicationDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013029822-A |
| titleOfInvention |
Positive resist composition |
| abstract |
It is possible to form a resist film by wet coating of an organic polymer substrate with little influence on organic materials such as dissolution or swelling, and the resist film and resist pattern formed on the substrate are positive in solvent resistance. A mold resist composition. A positive resist composition containing a fluorinated aliphatic alcohol, a polymer, a vinyl compound, and a photoacid generator, wherein the fluorinated aliphatic alcohol is a monohydric alcohol and contains carbon. A positive resist composition having 2 to 8 hydrogen atoms and not more than the number of fluorine atoms. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020158316-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020158316-A1 |
| priorityDate |
2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |