| abstract |
A minute inclined structure is manufactured. A step (a) of forming a sacrificial film above the substrate, a step (b) of forming a first film above the sacrificial film, and a second film, which are connected to the substrate Forming a second film including a first part, a second part connected to the first film, and a third part located between the first part and the second part; The step (c), the step (d) for removing the sacrificial film, and the step of bending the third portion of the second film after the step (d) to tilt the first film with respect to the substrate. (E). [Selection] Figure 3 |