http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013019945-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2011-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f853984c85e67773ba6e4556eadbb0f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4beeec5cb2957b77af06641ebdc1b44f |
| publicationDate | 2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013019945-A |
| titleOfInvention | Resist pattern forming method |
| abstract | The present invention provides a resist pattern forming method capable of forming a fine pattern stably without causing a collapse of a resist pattern or a bridge formation when forming a negative resist pattern. [Solution] (A) a step of forming a film with a chemically amplified resist composition that is negativeized by a crosslinking reaction; (A) a resist pattern forming method comprising a step of exposing the film, and (c) a step of developing using a developer containing an organic solvent, wherein the resist composition comprises: (A) a low molecular weight compound having a molecular weight of 500 to 5,000, (B) Acid generation that generates acid directly or indirectly by irradiation with any radiation selected from the group consisting of visible light, ultraviolet light, excimer laser, electron beam, extreme ultraviolet light (EUV), X-ray and ion beam Agent, A resist pattern forming method comprising (C) an acid crosslinking agent and (D) a solvent. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114958072-A |
| priorityDate | 2011-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 740.