| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95585944cd76ddfb6dc33ed2a0b84403 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363 |
| filingDate |
2012-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2e7f1c48263e8c09fe91cffc7f91c32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6af38d38e6a7564993c51aa668a979ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce28c30b4643c62fdf2f0595a40e39d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef4dd774992d7d26abc8256bf4d728f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f3853d9170fd8220b7ca43354bbc553 |
| publicationDate |
2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013016866-A |
| titleOfInvention |
Laminated structure having oxide semiconductor thin film layer, method for producing laminated structure, thin film transistor, and display device |
| abstract |
The present invention provides a high quality oxide thin film by controlling the direction of crystal arrangement of the oxide thin film. A layered structure including an oxide layer and an insulating layer serving as a channel layer of a thin film transistor, wherein a material constituting the oxide layer substantially includes a bixbite structure of indium oxide, and the oxide layer The laminated structure is characterized in that the carrier concentration is 10 18 / cm 3 or less, the average crystal grain size is 1 μm or more, and the crystals of the oxide layer are arranged in a columnar shape on the surface of the insulating layer. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014136916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543447-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019192927-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6036984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014136916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015142047-A |
| priorityDate |
2010-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |