http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013006832-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F28-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5783c924eb99533d01f0b89dc260e78 |
| publicationDate | 2013-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013006832-A |
| titleOfInvention | Compound, resin, resist composition, and method for producing resist pattern |
| abstract | An object of the present invention is to provide a resist composition capable of producing a resist pattern with an excellent shape. A compound represented by formula (I), a resin having a structural unit derived from the compound, and a resist composition containing the resin. [Wherein, R 1 represents a hydrogen atom or a methyl group; ring W 1 represents an optionally substituted sultone ring having 3 to 34 carbon atoms. ] [Selection figure] None |
| priorityDate | 2011-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 262.