http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012523706-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-38 |
| filingDate | 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012523706-A |
| titleOfInvention | Method and apparatus for removing contaminants from a substrate |
| abstract | A method is provided for removing contaminant metals from a substrate and improving electrical performance. Polycationic metals are known to be significantly detrimental to the electrical properties of insulators or semiconductor substrates. In order to improve the electrical performance of the substrate, the method uses formula (I): [Wherein n is independently an integer value between 0 and 6 at each occurrence, X is independently H, NR 4 , Li, Na or K at each occurrence, and at least one of X Is NR 4 and R is independently H or C 1 -C 6 alkyl at each occurrence. Exposure of the substrate to an aqueous solution of at least one compound. The kit for preparing this type of solution comprises a total of 1 to 20 weight percent aqueous concentrate of at least one compound of formula (I). The kit also provides instructions for diluting the concentrate to form a solution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022190830-A1 |
| priorityDate | 2009-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.