| abstract |
【Task】 According to one embodiment of the present invention, a cleaning solution is provided that includes a corrosion inhibitor, a solubilizer, an oxygen scavenger, and a complexing agent that also functions as a pH adjuster. In another embodiment of the present invention, a cleaning solution is provided that includes a pH adjuster, an optional complexing agent, and a corrosion inhibitor. The cleaning solution may optionally have a solubilizer, may optionally have a surfactant, and may optionally have a dielectric etchant. |