| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-80 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18 |
| filingDate |
2012-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f4d3b074e2692f1e6dbefd6ffaba251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f996e12efece5e39f43110fd370c5b64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_197e8c25d92a6fe7e3ef3d9a18890571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40a1ac5b357e55548262a1e59476b10f |
| publicationDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012254968-A |
| titleOfInvention |
Condensate, photosensitive composition, method for producing the same, and method for forming negative resist pattern using the same |
| abstract |
Alkali silane hydrolyzate, which has a storage stability and is capable of obtaining a film having a pencil hardness of HB or higher and having no film thickness even when the film thickness is 1.5 μm or more when heated and fired. Condensates obtained by decomposition and condensation reactions are provided. An alkoxysilane A represented by general formula (1): Si (OR 1 ) 4 and an alkoxysilane B represented by general formula (2) :( R 2 ) Si (OR 1 ) 3 The alkoxysilane C represented by the formula (3) :( R 2 ) 2 Si (OR 1 ) 2 is represented by a molar ratio, and alkoxysilane A: alkoxysilane B: alkoxysilane C = 0 to 70:30 to 100: Condensate of alkoxysilane condensed in the range of 0-70. (R 1 is a methyl group or an ethyl group, and R 2 is a methyl group, an ethyl group, or a phenyl group.) [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015146804-A1 |
| priorityDate |
2011-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |