| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4801deee30e01a9057820c737a2ab98c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate |
2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ea7d7cff4c8f38125dbd943c4a335f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc6e51adaea78ee2376481a70d11eb53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f5d10cf9f650fec754407c422688065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfc288ffc813f5f379b82a3d75813533 |
| publicationDate |
2012-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012253225-A |
| titleOfInvention |
Etching solution composition and etching method |
| abstract |
Provided is an etching solution composition that can be roughened by forming an uneven shape on the surface of an object to be etched appropriately by etching. An etching solution composition is an etching solution composition that forms a concavo-convex shape by etching a surface 16 of an object to be etched, and includes a hydrogen peroxide solution and an organic acid. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10283670-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105062491-A |
| priorityDate |
2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |