| abstract |
An ion microscope having an ion beam having a spot size of 10 nm or less on the surface of a sample using a gas field ion source and excellent in versatility and long instrument reliability. A spot size having a size of 10 nm or less on a sample surface, a luminance of 1 × 109 A / cm 2 sr or more, a reduced luminance of 5 × 10 8 A / cm 2 srV or more, an etendue of 5 × 10 −21 cm 2 sr or less, 1 Features a system that includes a gas field ion source capable of generating an ion beam having a reduced etendue of × 10-16 cm2 srV or less. [Selection] Figure 1 |