| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 |
| filingDate |
2011-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ca8a5136dddb6db7fba6eb6c74ef26e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c419bf57f79ed6d1a7d97dd037c2dc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_921c588ec7cc7ece35bec49799dcdb23 |
| publicationDate |
2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012245458-A |
| titleOfInvention |
Acid detergent composition for electronic material substrate |
| abstract |
An acidic detergent composition that suppresses deterioration of surface roughness after polishing and has excellent detergency is provided. A water-soluble compound, an acid, and water having an oxyalkylene group having 2 to 4 carbon atoms having an average addition mole number of 10 to 90 and an anionic group (excluding a carboxylic acid group) or a salt thereof. An acidic cleaning composition for an electronic material substrate for cleaning an electronic material substrate to which a silica abrasive and / or silica polishing debris having a pH at 25 ° C. of more than 0.5 and less than 5.0 is contained. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015030216-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015030216-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017222840-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018046153-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105493184-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104450281-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110402478-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017212827-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I675913-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S61229452-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015125791-A |
| priorityDate |
2011-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |