http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012243837-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317 |
| filingDate | 2011-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efe5f6d4bbce669922d812805853ddef |
| publicationDate | 2012-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012243837-A |
| titleOfInvention | Method for manufacturing ceramic film, method for manufacturing piezoelectric element, method for manufacturing liquid jet head, and method for manufacturing liquid jet device |
| abstract | A method of manufacturing a ceramic film and a method of manufacturing a piezoelectric element capable of suppressing the occurrence of cracks are provided. An application step of applying a ceramic film-forming composition containing a metal complex to form a ceramic precursor film, a crystallization step of crystallizing the ceramic precursor film by heating to form a ceramic film, The shrinkage rate of the film thickness in the crystallization process is set to be 27% or more and 45% or less. [Selection figure] None |
| priorityDate | 2011-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.