Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D335-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38 |
filingDate |
2012-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd54a8a70395012d8a7f964f5deb76cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 |
publicationDate |
2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2012234166-A |
titleOfInvention |
Resist composition and method for producing resist pattern |
abstract |
An object of the present invention is to provide a resist composition capable of obtaining a resist pattern having excellent line edge roughness (LER). A resist composition comprising a resin having a structural unit derived from a compound represented by formula (I) and a salt represented by formula (B1). [Wherein R 1 is a hydrogen atom or a methyl group; R 2 is a hydroxy group or an alkyl group; A 1 is a single bond, etc .; 1 is an integer of 0 to 3; and Q 1 and Q 2 are each a fluorine atom or Perfluoroalkyl group; L b1 is a divalent saturated hydrocarbon group; Y is an aliphatic hydrocarbon group which may have a substituent or an alicyclic hydrocarbon group which may have a substituent; Z + Represents an organic cation. ] [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020196667-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210144702-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021181633-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113614073-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11635687-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11644751-B2 |
priorityDate |
2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |