http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012234013-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-20 |
| filingDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85a1a530139bc547b3cea219a6113393 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e43cf27a806f190db86290a137282549 |
| publicationDate | 2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012234013-A |
| titleOfInvention | Metal pattern material and manufacturing method thereof |
| abstract | Provided are a metal pattern material and a metal pattern material manufacturing method capable of forming a fine line or small dot metal pattern with high resolution after plating. When a specific photosensitive material for plating formation is exposed at a pitch of less than 6 μm, it is less than 100% of the optimum power at the time of 6 μm pitch exposure, and [(pitch (μm) × 75/6 + 25 ) -30] to [(Pitch (μm) × 75/6 + 25) +15]% exposure step, development step for developing the photosensitive material for plating formation after exposure with a developer, and after development And a plating process for plating the photosensitive material for forming a plating on which the pattern is formed with a plating bath ratio of less than 10. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023119998-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114786342-A |
| priorityDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 373.