http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012226949-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02A50-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L9-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e3e18610739bc145b77d6426a40c9ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee551040543b1e13bef12ac301d105fa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3989bf86831705cd9db4b9a7df6a5c92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5b254ac7ac0b44fa68e56af590c337e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f35c8f4ac821017d81edc172f68f6620 |
| publicationDate | 2012-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012226949-A |
| titleOfInvention | Plasma generating apparatus and plasma generating method |
| abstract | Provided are a plasma generation apparatus and a plasma generation method for stabilizing the generation amount of active species by increasing the generation amount of active species and stabilizing the generation of plasma. A plasma electrode unit having a pair of electrodes 21 and 22 provided with dielectric films 21a and 22a on opposite surfaces, and applying a predetermined voltage between the pair of electrodes 21 and 22 to discharge plasma. The fluid passage holes 21b and 22b are provided in the corresponding portions of the pair of electrodes 21 and 22, respectively, so that they pass therethrough, and the housing 25 that holds the pair of electrodes 21 and 22 is provided. At least a part of the side opening 2M formed by the pair of electrodes 21 and 22 is opened to improve the drying performance of the dielectric films 21a and 22a. [Selection] Figure 9 |
| priorityDate | 2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.