http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012224616-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07J9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2012-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 |
| publicationDate | 2012-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012224616-A |
| titleOfInvention | Salt, resist composition and method for producing resist pattern |
| abstract | Provided are a salt useful as an acid generator, a resist composition containing the salt as an acid generator, and a method for producing a resist pattern. A salt represented by formula (I). [In Formula (I), Q 1 and Q 2 each independently represents a fluorine atom or the like. L 1 represents an aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms, and the methylene group constituting the aliphatic saturated hydrocarbon group may be replaced with an oxygen atom or a carbonyl group. W represents a group having a cyclopentahydrophenanthrene ring portion substituted with a hydroxyl group. Z + represents an organic cation. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019214551-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7190966-B2 |
| priorityDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 212.