| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-02 |
| filingDate |
2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a05a3a34a52f303c0501be5826664fc |
| publicationDate |
2012-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012216375-A |
| titleOfInvention |
Coating apparatus and coating film forming system |
| abstract |
A coating apparatus capable of satisfactorily coating a coating film on a substrate and a coating film forming system incorporating the coating apparatus are provided. A first rotation angle θ1 of a nozzle 11 is calculated according to the shape of a coated film acquired by a film thickness measuring unit 19. Then, in a state where the first drive control unit 93a swings the nozzle 11 so that the posture of the nozzle 11 during the application start period becomes the first rotation angle θ1 calculated by the first rotation angle calculation unit 93c. A film 7 is formed on the substrate 5. As a result, the coating film 7 in the coating start period is prevented from being “blured” or “swelled” and has a uniform thickness. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022158158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019150846-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112517321-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014143099-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112517321-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019141826-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019145420-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10500605-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114447260-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018513536-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017010644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107912025-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107912025-A |
| priorityDate |
2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |