http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012210567-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00b3d6a186d6f502f4c256b3e86fc30c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D21-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-44 |
| filingDate | 2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9517193c1653c1553355eb8e6b668a90 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62d949178c7aaf7b71d9b350fc4052d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81a13f7f15205bb300b483e5be346481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85f5490884f2b465479a7db761452b9b |
| publicationDate | 2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012210567-A |
| titleOfInvention | Development waste liquid recycling apparatus and recycling method |
| abstract | A development waste solution containing a resist strip and a tetraalkylammonium hydroxide (TAAH) is stably and efficiently regenerated. A developer waste solution containing a resist strip and TAAH is adjusted to a pH of 8 to 12, and then subjected to a membrane separation treatment with an MF membrane module 4 to circulate the concentrated water. Alternatively, a polymer flocculant is added to perform the flocculation / solid-liquid separation treatment, and the separated water is returned to the primary side of the MF membrane module 4 to perform the membrane separation treatment. When the developer wastewater is subjected to membrane separation treatment, the flocculant is added to the concentrated water obtained by the membrane separation treatment instead of the membrane supply water, and then the aggregation / solid-liquid separation treatment is performed. By returning and membrane separation treatment with development waste liquid, the amount of coagulant used is reduced, and the facilities for coagulation and solid-liquid separation are reduced in size, and the turbidity load on the membrane is reduced and stable and efficient. Can be processed. [Selection] Figure 1 |
| priorityDate | 2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.