http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012189320-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cd5edf56ca5188b9614870367bb3728 |
| publicationDate | 2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012189320-A |
| titleOfInvention | Persulfuric acid concentration measuring method, persulfuric acid concentration measuring device, and persulfuric acid supplying device |
| abstract | A persulfuric acid concentration measuring method, a persulfuric acid concentration measuring device, and a persulfuric acid concentration measuring device capable of accurately measuring the persulfuric acid concentration in a persulfuric acid containing sulfuric acid solution without hindering the use of the persulfuric acid containing sulfuric acid solution after the concentration measurement A persulfuric acid supply apparatus having the measurement device is provided. A working electrode 3a and a reference electrode 3b that are in contact with a persulfuric acid-containing sulfuric acid solution, a potentiostat 4 that sweeps the potential of the working electrode 3a with respect to the reference electrode 3b, and measures a response current at that time. The total oxidant concentration is obtained based on the first current value measured by the potentiostat 4 when the potential of the electrode 3a is a preset negative potential, and the potential of the working electrode 3a is a preset positive potential. , An oxidant concentration determination unit 5 for determining the hydrogen peroxide concentration based on the second current value measured by the potentiostat 4, and the total oxidant concentration and the peroxide determined by the oxidant concentration determination unit 5 And a persulfuric acid concentration determination unit 6 that determines a persulfuric acid concentration based on the hydrogen concentration. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014513803-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6024936-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101791490-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105452845-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105452845-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017163456-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10056248-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016538555-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015012041-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016114188-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107076716-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017173218-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016136139-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I585388-B |
| priorityDate | 2011-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.