| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02A50-20 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L9-22 |
| filingDate |
2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e3e18610739bc145b77d6426a40c9ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f35c8f4ac821017d81edc172f68f6620
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e0aa83d1cbf6233536e372af8afd7ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee551040543b1e13bef12ac301d105fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56ec03e0e447e896b6d48c9dcbb53578 |
| publicationDate |
2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012187225-A |
| titleOfInvention |
Plasma generating apparatus and plasma generating method |
| abstract |
An object of the present invention is to increase the generation amount of active species and make it difficult for condensation and moisture adhesion to occur on a dielectric film. A coating layer is provided on a surface of a dielectric film having a pair of electrodes provided with a dielectric film on at least one of opposing surfaces, and plasma discharge is performed by applying a predetermined voltage between the electrodes. It has been. [Selection] Figure 2 |
| priorityDate |
2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |