| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2012-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a988f3fec52dd71e838f0c20ad819dc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0106502b1821cd02a499d92f680621ab |
| publicationDate |
2012-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012176936-A |
| titleOfInvention |
Salt, acid generator, resist composition, and method for producing resist pattern |
| abstract |
A resist composition capable of obtaining a resist pattern having excellent line edge roughness (LER) is provided. A salt represented by the following: [Wherein, Q 1 and Q 2 each independently represent a fluorine atom or a perfluoroalkyl group; L 1 and L 2 each independently represent a divalent saturated hydrocarbon group and constitute the group The methylene group may be replaced with an oxygen atom or a carbonyl group; Y represents an alicyclic hydrocarbon group which may have a substituent, and the methylene group contained in the group includes an oxygen atom, a sulfonyl group May be replaced by a group or a carbonyl group; Z + represents an organic counterion. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019189655-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022075817-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10221131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7361822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016347709-A1 |
| priorityDate |
2011-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |