http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012175036-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33398195ccd1af527b1552705f130c2a |
| publicationDate | 2012-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012175036-A |
| titleOfInvention | Substrate processing method and substrate processing apparatus |
| abstract | A substrate processing method and a substrate processing apparatus capable of performing a cleaning process without damaging a pattern on a substrate. After tertiary butanol is supplied to the substrate surface Wf, DIW is supplied to the substrate surface Wf to leave the tertiary butanol only inside the pattern gap. Thereafter, the substrate is cooled, and tertiary butanol and DIW are solidified. Tertiary butanol has a higher freezing point than DIW and a small increase in volume when solidified. Therefore, before the DIW solidifies, it solidifies inside the pattern gap and structurally reinforces the pattern. In addition, since the increase in volume is small, the stress applied to the pattern is small compared to DIW. Accordingly, it is possible to clean the substrate surface Wf while preventing damage to the pattern. [Selection] Figure 14 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3249682-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101147-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021331192-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109904093-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017136533-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109904093-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019176179-A1 |
| priorityDate | 2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.