Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M2223-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M2215-224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M2215-223 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M2215-221 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10N2040-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M2215-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10N2040-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M2219-044 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M171-00 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10N40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10N30-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M105-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M105-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M105-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M105-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M159-12 |
filingDate |
2011-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_135dd25d69b1d29a6e388ed4cf40ce71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6532376271a0520672199443ac0d7434 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7e156ed0fb9794aa55453127d70698f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aaa88c516f2312ef8056a5d7284c8cb |
publicationDate |
2012-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2012172030-A |
titleOfInvention |
Vacuum device and lubricating oil used therefor |
abstract |
【Task】 When the ionic liquid is slid in a vacuum device under severe conditions, the ionic liquid may be decomposed and the decomposition products may contaminate the vacuum device. [Solution] Lubricating oil used for a driving mechanism provided in the vacuum chamber surrounding the sample is composed of a hydrophobic anion and a hydrophobic cation. As the hydrophobic anion, an anion (eg, [N (CF 3 SO 2 ) 2 ] − ) having an appropriate viscosity and not having a weak bond such as a CC bond is used in order not to release impurities. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108165344-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013012827-A1 |
priorityDate |
2011-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |