http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012165303-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6fd6fbd7e6cf55eec3a3fd16faf07711 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa500b65158889515895fba070c7a370 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 |
| filingDate | 2011-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_718f07bcf5127bb0bb2abdc85b79bbc4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37eb9de987324db9c50779562086e8ef |
| publicationDate | 2012-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012165303-A |
| titleOfInvention | Manufacturing method of crystal unit |
| abstract | The present invention provides a method for manufacturing a crystal resonator that forms an external pattern of the crystal resonator with high accuracy. A step of forming a corrosion-resistant film 3 on a main surface of a crystal wafer 1, a first resist 4a on a corrosion-resistant film 3 on a first main surface, and a second resist 4b on a corrosion-resistant film on a second main surface. Forming the alignment mark 5, exposing the alignment mark 5 outside the product area of the first main surface, developing the first resist 4 a to expose the corrosion-resistant film 3, and forming the alignment mark 5. A step of exposing the outer shape pattern of the crystal resonator on the first main surface using the alignment mark 5 formed; a step of exposing the outer shape pattern of the crystal resonator on the second main surface using the alignment mark 5; The resist and the second resist are developed under the same conditions. [Selection] Figure 1 |
| priorityDate | 2011-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.