| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92aa1063deb1ff107ba6895a87674e5a |
| publicationDate |
2012-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012158815-A |
| titleOfInvention |
Method for treating polysilanes |
| abstract |
Provided is a method for safely treating polysilanes formed as by-products when a microcrystalline silicon film is formed by a CVD method. When a microcrystalline silicon film or an amorphous silicon film is deposited on a substrate by a plasma CVD method, polysilanes generated as by-products in a vacuum chamber and deposited and adhered in a vacuum pump are processed. A method comprising injecting and filling an organic solvent selected from a lubricating oil into a vacuum pump, leaving it for a predetermined period of time, and then disassembling the vacuum pump to which a polysilane-dispersed organic solvent is adhered. Is washed with washing oil. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020145455-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020145456-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015051885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019181045-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019181044-A1 |
| priorityDate |
2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |